Laser micromachining of silicate glasses containing silver ions using a pulsed laser

被引：8

作者：

Koyama, T

Tsunetomo, K

机构：

[1] Nippon Sheet Glass Co., Ltd., Tsukuba Research Center, Technical Research Laboratory, 5-4 Tokodai, Tsukuba-shi

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1997年 / 36卷 / 2B期

关键词：

laser machining; laser ablation; glass; ion exchange; silver; grating; phase mask;

D O I：

10.1143/JJAP.36.L244

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Suitable glasses for laser micromachining using a Nd:YAG laser have been developed. These glasses contain Ag ions introduced using the ion exchange technique. After machining with the 2nd and 3rd harmonic beams of a pulsed Nd:YAG laser, the irradiation region has a smooth surface without microcracking. A phase mask pattern is successfully transcribed on the glass surface through machining with a 355 nm pulsed beam. The irradiation area acts as a surface-relief grating.

引用

页码：L244 / L247

页数：4

共 9 条

[1]

BRAREN B, 1988, J VAC SCI TECHNOL B, V6, P532

[2] GLASS-SURFACE TREATMENT WITH EXCIMER AND CO2-LASERS [J].

BUERHOP, C ;

BLUMENTHAL, B ;

WEISSMANN, R ;

LUTZ, N ;

BIERMANN, S .

APPLIED SURFACE SCIENCE, 1990, 46 (1-4) :430-434

[3] BRAGG GRATINGS FABRICATED IN MONOMODE PHOTOSENSITIVE OPTICAL FIBER BY UV EXPOSURE THROUGH A PHASE MASK [J].

HILL, KO ;

MALO, B ;

BILODEAU, F ;

JOHNSON, DC ;

ALBERT, J .

APPLIED PHYSICS LETTERS, 1993, 62 (10) :1035-1037

[4] EXCIMER-LASER ABLATION OF ND-YAG AND ND-GLASS [J].

JACKSON, SR ;

METHERINGHAM, WJ ;

DYER, PE .

APPLIED SURFACE SCIENCE, 1995, 86 (1-4) :223-227

[5] WAVELENGTH TUNABILITY OF THE SURFACE-PLASMON RESONANCE OF NANOSIZE METAL COLLOIDS IN GLASS [J].

MAGRUDER, RH ;

WITTIG, JE ;

ZUHR, RA .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1993, 163 (02) :162-168

[6] SINGLE-EXCIMER-PULSE WRITING OF FIBER GRATINGS BY USE OF A ZERO-ORDER NULLED PHASE MASK - GRATING SPECTRAL RESPONSE AND VISUALIZATION OF INDEX PERTURBATIONS [J].

MALO, B ;

JOHNSON, DC ;

BILODEAU, F ;

ALBERT, J ;

HILL, KO .

OPTICS LETTERS, 1993, 18 (15) :1277-1279

[7]

NISHII J, 1996, OPT LETT, V17, P1360

[8]

NOWAK R, 1993, GLASTECH BER-GLASS, V66, P227

[9]

ROSS L, 1989, GLASTECH BER-GLASS, V62, P285

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