Electromagnetic actuation for MOEMS, examples, advantages and drawbacks of MAGMAS

Electromagnetic actuation is applied to optical electro-mechanical systems (MOEMS) for industrial applications requiring large and long-range forces. Advantages and drawbacks are outlined while downscaling laws are discussed. Technological improvements and new available materials bring the limit between electromagnetism and electrostatic to much smaller dimensions. Remote control and bi-stability are unique characteristics of electromagnetic actuation. The importance of remote control is stressed so as to allow easy tests and optimisation with no technological compatibility problem. These advantages are illustrated on three different optical magnetic micro-actuator and system or electromagnetic MOEMS, developed in LIMMS, a Franco-Japanese research Laboratory based in Tokyo. The first is a resonant I D magnetic scanner, the second is a magnetic bi-stable matrix array of optical micro-switches and the last is a remarkable application of the properties of thick magnetostrictive thin layers to a 2D scanner. (C) 2002 Elsevier Science B.V. All rights reserved.