Sensitivity Analysis of Single-Drive, 3-axis MEMS Gyroscope Using COMSOL Multiphysics

In this paper, a COMSOL Multiphysics-based methodology is presented for evaluation of the microelectromechanical systems (MEMS) gyroscope. The established finite element analysis (FEA) model was successfully validated through a comparison with analytical and Matlab/Simulink analysis results. A simplified single-drive, 3-axis MEMS gyroscope was analyzed using a mode split approach, having a drive resonant frequency of 24,918 Hz, with the x-sense, y-sense, and z-sense being 25,625, 25,886, and 25,806 Hz, respectively. Drive-mode analysis was carried out and a maximum drive-displacement of 4.0 mu m was computed for a 0.378 mu N harmonic drive force. Mechanical sensitivity was computed at 2000 degrees per second (dps) input angular rate while the scale factor for roll, pitch, and yaw was computed to be 0.014, 0.011, and 0.013 nm/dps, respectively.