Thin-film Thickness Absolute Measurement by Differential Optic-fiber White Light Interferometry

被引：1
|
作者：
Lu, Xu [1 ]
Yu, Zhangjun [1 ]
Yang, Jun [2 ]
Yuan, Yonggui [2 ]
Li, Hanyang [2 ]
Yuan, Libo [2 ]
机构：
[1] Harbin Engn Univ, Coll Sci, Harbin, Peoples R China
[2] Harbin Engn Univ, Minist Educ China, Key Lab In Fiber Integrated Opt, Harbin, Peoples R China
来源：
2019 IEEE INTERNATIONAL INSTRUMENTATION AND MEASUREMENT TECHNOLOGY CONFERENCE (I2MTC) | 2019年
基金：
国家重点研发计划; 中国国家自然科学基金;
关键词：
thin-film thickness measurement; differential measuring in probe; optic-fiber white light interferometry; PROFILE MEASUREMENT; SURFACE; LAYERS;
D O I：
10.1109/i2mtc.2019.8826878
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A differential optic-fiber white light interferometry for thin-film thickness measurement is proposed. By established a reference plate inside of the probe, we design a new structure thin-film thickness measuring probe and realize direct measurement of thin-film thickness without pre-calibration of system. The method is insensitive to the materials of thin-film under test, it is only need two boundaries of thin-film could reflect the exit light from probe. The proposed method could achieve non-contact, non-destructive and self-calibration thin-film thickness measurement. Experiment results show that it could realize (9.6-477) mu m transparent and opaque thin-film thickness measurement with (0.05+0.029L(m)) uncertainty.
引用
收藏
页码：1009 / 1013
页数：5
相关论文
共 50 条
  • [1] Dispersive white-light interferometry for thin-film thickness profile measurement
    Ghim, YS
    Kim, SW
    Optical Measurement Systems for Industrial Inspection IV, Pts 1 and 2, 2005, 5856 : 419 - 426
  • [2] Sensitivity analysis of thin-film thickness measurement by vertical scanning white-light interferometry
    Dong, Jing-tao
    Lu, Rong-sheng
    APPLIED OPTICS, 2012, 51 (23) : 5668 - 5675
  • [3] White light scanning interferometry for thickness measurement of thin film layers
    Kim, GH
    Kim, SW
    OPTICAL DIAGNOSTICS FOR FLUIDS/HEAT/COMBUSTION AND PHOTOMECHANICS FOR SOLIDS, 1999, 3783 : 239 - 246
  • [4] Thickness-profile measurement of transparent thin-film layers by white-light scanning interferometry
    Kim, SW
    Kim, GH
    APPLIED OPTICS, 1999, 38 (28) : 5968 - 5973
  • [5] Thickness and Surface Measurement of Transparent Thin-Film Layers using White Light Scanning Interferometry Combined with Reflectometry
    Jo, Taeyong
    Kim, KwangRak
    Kim, SeongRyong
    Pahk, HeuiJae
    JOURNAL OF THE OPTICAL SOCIETY OF KOREA, 2014, 18 (03) : 236 - 243
  • [6] Initial estimation of thin film thickness measurement based on white light spectral interferometry
    Guo, Tong
    Wu, Juhong
    Ni, Lianfeng
    Fu, Xing
    Hu, Xiaotang
    THIN SOLID FILMS, 2016, 612 : 267 - 273
  • [7] Thickness measurement of transparent film by white-light interferometry
    Deng, Qinyuan
    Zhou, Yi
    Liu, Junbo
    Yao, Jingwei
    Hu, Song
    8TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: DESIGN, MANUFACTURING, AND TESTING OF MICRO- AND NANO-OPTICAL DEVICES AND SYSTEMS; AND SMART STRUCTURES AND MATERIALS, 2016, 9685
  • [8] Simultaneous measurements of thin-film thickness and refractive index by dispersive white-light interferometry
    Ghim, Young-Sik
    You, Joonho
    Kim, Seung-Woo
    THIN-FILM COATINGS FOR OPTICAL APPLICATIONS IV, 2007, 6674
  • [9] APPLICATION OF WHITE-LIGHT INTERFEROMETRY IN THIN-FILM MEASUREMENTS
    LIN, C
    SULLIVAN, RF
    IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1972, 16 (03) : 269 - &
  • [10] Self-Calibrated Absolute Thickness Measurement of Opaque Specimen Based on Differential White Light Interferometry
    Lu, Xu
    Yuan, Yonggui
    Ma, Chi
    Zhu, Haibo
    Zhu, Yunlong
    Yu, Zhangjun
    Zhang, Xiaojun
    Jiang, Fuqiang
    Zhang, Jianzhong
    Li, Hanyang
    Yang, Jun
    Yuan, Libo
    IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 2020, 69 (05) : 2507 - 2514
12345