Laser differential reflection-confocal lens thickness measurement

被引:0
作者
Zhou, Nan [1 ]
Wang, Yun [1 ]
Zhao, Weiqian [1 ]
Qiu, Lirong [1 ]
Chen, Lingfeng [1 ]
机构
[1] Beijng Inst Technol, Optoelect Coll, Beijing Key Lab Precis Optoelect Measurement Inst, Beijing 100081, Peoples R China
来源
AOPC 2015: OPTICAL TEST, MEASUREMENT, AND EQUIPMENT | 2015年 / 9677卷
关键词
Differential confocal; lens thickness; precision measurement; focusing;
D O I
10.1117/12.2199689
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A new laser differential reflection-confocal lens thickness measurement (DRCTM) method is proposed for the high-accuracy measurement of the lens thickness. DRCTM uses the test beam reflected from the lens first and last surface to determine the vertex positions of the two surfaces. Differential confocal technology is used to precisely identify the lens vertexes of the lens first and last surfaces, thereby enabling the precise measurement of the lens thickness. Compared with the existing measurement methods, DRCTM has high accuracy and strong anti-interference capability. Theoretical analysis and experimental results indicate that the DRCTM measurement error can be limited to 0.0015%.
引用
收藏
页数:7
相关论文
共 12 条
[1]  
[Anonymous], 2009, OPTICS EXPRESS, V17
[2]  
Antonin M., 2010, APPL OPTICS, V49
[3]  
Jiadong J., 2005, SENSOR TECHNOLOGY, P26
[4]  
Jiamiao Y., 2012, OPTICS EXPRESS, V20
[5]  
Lee C, 2008, Apparatus for measuring thickness of lens US Patent, Patent No. [7637025B2, 7637025]
[6]  
Libo S., 2012, CHINESE J SCI INSTRU
[7]  
Maruyama H., 2000, OPTICAL REV, V7
[8]  
Ruoduan S., 2012, APPL OPTICS, V51
[9]  
Wang Y., 2012, MEASUREMENT SCI TECH, V23
[10]  
Weiqian Z., 2004, OPTICS EXPRESS, V12