Self-Ordered Hexagonal Nanoporous Hafnium Oxide and Transition to Aligned HfO2 Nanotube Layers

被引：42

作者：

Berger, Steffen ^{[1
]}

Jakubka, Florian ^{[1
]}

Schmuki, Patrik ^{[1
]}

机构：

[1] Univ Erlangen Nurnberg, Inst Surface Sci & Corros LKO, Dept Mat Sci & Engn, D-91058 Erlangen, Germany

来源：

ELECTROCHEMICAL AND SOLID STATE LETTERS | 2009年 / 12卷 / 07期

关键词：

anodisation; electrochemistry; electrolytes; hafnium compounds; nanofabrication; nanoporous materials; nanotubes; TIO2; NANOTUBES; ELECTROCHEMICAL ANODIZATION; ELECTROLYTES; TITANIUM; FILMS; COATINGS; ZIRCONIA; ALUMINA; ARRAYS;

D O I：

10.1149/1.3117253

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

We show that hexagonally ordered HfO2 structures can either be grown to form a self-ordered pore or tube array, depending only on the electrochemical conditions during anodization of Hf in fluoride containing electrolytes. The water content in the electrolyte is the main factor affecting the transition from pores to tubes and the regularity of the structures. In the self-ordered nanoporous anodic hafnia layers, the cell diameters can be adjusted from 40 to 120 nm controlled by the applied voltage and a tube/pore length of similar to 20 mu m can be reached.

引用

页码：K45 / K48

页数：4

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