Note: Spring constant calibration of nanosurface-engineered atomic force microscopy cantilevers

被引:5
作者
Ergincan, O. [1 ]
Palasantzas, G. [1 ]
Kooi, B. J. [1 ]
机构
[1] Univ Groningen, Zernike Inst Adv Mat, Nanostruct Mat & Interfaces Grp, NL-9747 AG Groningen, Netherlands
关键词
SENSORS;
D O I
10.1063/1.4864195
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
The determination of the dynamic spring constant (k(d)) of atomic force microscopy cantilevers is of crucial importance for converting cantilever deflection to accurate force data. Indeed, the non-destructive, fast, and accurate measurement method of the cantilever dynamic spring constant by Sader et al. [Rev. Sci. Instrum. 83, 103705 (2012)] is confirmed here for plane geometry but surface modified cantilevers. It is found that the measured spring constants (k(eff), the dynamic one k(d)), and the calculated (k(d,1)) are in good agreement within less than 10% error. (C) 2014 AIP Publishing LLC.
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页数:3
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