A Silicon-Polymer Hybrid Modulator-Design, Simulation and Proof of Principle

被引：32

作者：

Himmelhuber, Roland ^{[1
]}

Herrera, Oscar D. ^{[1
]}

Voorakaranam, Ram ^{[1
]}

Li, Li ^{[2
]}

Jones, Adam M. ^{[1
]}

Norwood, Robert A. ^{[1
]}

Luo, Jingdong ^{[3
]}

Jen, Alex K-Y. ^{[4
]}

Peyghambarian, Nasser ^{[1
]}

机构：

[1] Univ Arizona, Tucson, AZ 85721 USA

[2] TIPD LLC, Tucson, AZ 85705 USA

[3] Soluxra LLC, Seattle, WA 98145 USA

[4] Univ Washington, Seattle, WA 98195 USA

来源：

JOURNAL OF LIGHTWAVE TECHNOLOGY | 2013年 / 31卷 / 24期

关键词：

Electro-optic modulators; optical polymers; optical waveguides; semiconductor waveguides; silicon devices;

D O I：

10.1109/JLT.2013.2284547

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Optimal dimensions are found for the silicon waveguide in an electro-optic (EO) polymer cladding-based silicon waveguide modulator. The confinement factor as well as the effective index of the mode are taken into account. The influence of the coplanar electrode spacing and electrode height on performance are examined and a figure of merit formula for choosing the optimal device geometry is shown. The design space for both 1550 nm and 1310 nm wavelengths is explored. With the optimal 275 nm waveguide width and 4 mu m electrode spacing, a V-pi of a few volts can be achieved even with moderate r(33) EO polymers. Experimental results on a fabricated modulator are shown and compared with the predicted performance.

引用

页码：4067 / 4072

页数：6

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