Athermalized polymeric arrayed-waveguide grating by partial detachment from a Si substrate

被引：12

作者：

Lee, JM ^{[1
]}

Ahn, JT ^{[1
]}

Park, S ^{[1
]}

Lee, MH ^{[1
]}

机构：

[1] ETRI, Basic Res Lab, Taejon, South Korea

来源：

ETRI JOURNAL | 2004年 / 26卷 / 03期

关键词：

waveguide; polymer; AWG;

D O I：

10.4218/etrij.04.0203.0027

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We demonstrate a new fabrication method for adjusting the temperature dependence of a polymeric arrayed waveguide grating (AWG) on a Si substrate. A temperature-dependent wavelength shift of -0.1 nm/degreesC in a polymeric AWG on a Si substrate is reduced to +0.01 nm/degreesC by detachingpart of the polymer film, including the grating channel region of the AWG, from the Si substrate while the other parts remain fixed on the substrate.

引用

页码：281 / 284

页数：4

共 30 条

[1] Suppression of polarization dependence in the design of an arrayed-waveguide grating with photodefinable polyimide
Park, SR
O, BH
Jeong, J
Lee, SG
Lee, EH
OPTICAL MATERIALS, 2003, 21 (1-3) : 531 - 534
[2] A novel fabrication approach for an athermal arrayed-waveguide grating
Zhou, Tianhong
Ma, Weidong
JOURNAL OF SEMICONDUCTORS, 2010, 31 (01)
[3] A novel fabrication approach for an athermal arrayed-waveguide grating
周天宏
马卫东
半导体学报, 2010, (01) : 39 - 41
[4] Monolithic Integrated Athermal Arrayed-waveguide Grating Multiplexer and Demultiplexer
Wang, Minqi
Chen, Xiaomei
Guan, Chenggang
Yu, Jiekui
FIBER OPTIC SENSING AND OPTICAL COMMUNICATION, 2018, 10849
[5] Simulation and Design for an arrayed-waveguide grating made of fluorinated polymers
Xu, J
Dai, DX
He, SL
APOC 2002: ASIA-PACIFIC OPTICAL AND WIRELESS COMMUNICATIONS; OPTICAL COMPONENTS AND TRANSMISSION SYSTEMS, 2002, 4906 : 539 - 545
[6] Thermal behavior of arrayed-waveguide grating made of silica/polymer hybrid waveguide
Kim, DJ
Shin, JU
Han, YT
Park, SH
Park, YJ
Sung, HK
Kim, DK
ETRI JOURNAL, 2004, 26 (06) : 661 - 664
[7] Ultrasmall overlapped arrayed-waveguide grating, based on Si nanowire waveguides for dense wavelength division demultiplexing
Dai, Daoxin
He, Sailing
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2006, 12 (06) : 1301 - 1305
[8] A novel design of compact-structure arrayed-waveguide grating device
Li, BY
Jiang, XQ
Yang, JY
Wang, MH
FIBER OPTICS AND OPTOELECTRONICS FOR NETWORK APPLICATIONS, 2001, 4603 : 48 - 52
[9] Design and characterization of an arrayed-waveguide grating router with an interleave-chirped array
Asakura, Hideaki
Tsuda, Hiroyuki
IEICE ELECTRONICS EXPRESS, 2015, 12 (09):
[10] Experimental demonstration of an ultracompact Si-nanowire-based reflective arrayed-waveguide grating (de)multiplexer with photonic crystal reflectors
Dai, Daoxin
Fu, Xin
Shi, Yaocheng
He, Sailing
OPTICS LETTERS, 2010, 35 (15) : 2594 - 2596

← 1 2 3 →