Monolithically cascaded micromirror pair driven by angular vertical combs for two-axis scanning

被引：15

作者：

Fujino, M ^{[1
]}

Patterson, PR ^{[1
]}

Nguyen, H ^{[1
]}

Piyawattanametha, W ^{[1
]}

Wu, MC ^{[1
]}

机构：

[1] Univ Calif Los Angeles, Dept Elect Engn, Los Angeles, CA 90095 USA

来源：

IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS | 2004年 / 10卷 / 03期

基金：

美国国家科学基金会;

关键词：

angular vertical comb drive; micromirror; optical scanner; silicon-on-insulator (SOI) wafer;

D O I：

10.1109/JSTQE.2004.829203

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this work, monolithically cascaded one-axis micromirrors driven by angular vertical comb drives are designed and fabricated. Using W-shaped folded-beam optics, we demonstrate two-axis scanning covering +/-6.0degrees two-dimensional area at resonant modes of 7.5 kHz, +/-17 V for a fast-scanning mirror and 1.2 kHz, +/-7 V for a slow-scanning mirror. The experimental results satisfy the requirements for a surveying instrument.

引用

页码：492 / 497

页数：6

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