Fabrication and characterization of superconducting coplanar waveguide resonators

被引：2

作者：

Kim, Bongkeon ^{[1
]}

Jung, Minkyung ^{[2
]}

Kim, Jihwan ^{[3
]}

Suh, Junho ^{[3
]}

Doh, Yong-Joo ^{[1
]}

机构：

[1] Gwangju Inst Sci & Technol, Dept Phys & Photon Sci, Gwangju 61005, South Korea

[2] DGIST, DGIST Res Inst, Daegu 42988, South Korea

[3] Korea Res Inst Stand & Sci, Quantum Technol Inst, Daejeon 34113, South Korea

来源：

PROGRESS IN SUPERCONDUCTIVITY AND CRYOGENICS | 2020年 / 22卷 / 04期

基金：

新加坡国家研究基金会;

关键词：

superconducting resonator; coplanar waveguide; circuit quantum electrodynamics;

D O I：

10.9714/psac.2020.22.4.010

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

High-quality superconducting coplanar waveguide (SCPW) resonators are crucial for developing superconducting quantum information devices and sensors. We designed quarter-wavelength SCPW resonators and fabricated the SCPW resonators using Nb thin film. The resonant characteristics were measured at T = 4.2 K, revealing the intrinsic quality factor and the coupling quality factor to be Q(i) = 4,784 and Q(c) = 17, 980, respectively. Our design and fabrication techniques would be very useful to develop a gate-tunable superconducting qubit based on the semiconductor nanostructures.

引用

页码：10 / 13

页数：4

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