VLS growth of pure and Au decorated β-Ga2O3 nanowires for room temperature CO gas sensor and resistive memory applications

被引:75
作者
Weng, Tzu-Feng [1 ]
Ho, Mon-Shu [1 ,2 ,3 ]
Sivakumar, Chandrasekar [1 ,3 ]
Balraj, Babu [4 ]
Chung, Pei-Fang [1 ,3 ]
机构
[1] Natl Chung Hsing Univ, Dept Phys, Taichung 40227, Taiwan
[2] Natl Chung Hsing Univ, Inst Nanosci, Taichung 40227, Taiwan
[3] Natl Chung Hsing Univ, Innovat & Dev Ctr Sustainable Agr IDCSA, Taichung 40227, Taiwan
[4] Natl Tsing Hua Univ, Dept Elect Engn, Hsinchu 30013, Taiwan
关键词
beta-Ga2O3; nanowire; Au decoration; CO gas sensing; Resistive memory; SENSING PROPERTIES; GA2O3; NANOPARTICLES; LUMINESCENCE;
D O I
10.1016/j.apsusc.2020.147476
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
High-density single crystalline beta-Ga2O3 nanowires on silicon (1 0 0) substrates were grown by vapour-liquid-solid growth method. We have characterized the pure beta-Ga2O3 nanowires along with the Au-decorated beta-Ga2O3 nanowires. The CO gas sensors at room temperature (RT) have been studied for pure and Au decorated nanowires with multiple-networked array and single nanowire devices. The diameter of the 1D nanostructure ranged from 127 +/- 5 nm. The synthesized nanowires were studied using Field Emission Scanning Electron Microscope (FESEM), Transmission Electron Microscope (TEM), Energy Dispersive X-ray Spectroscopy (EDS), Gracing Incidence X-ray Diffraction (GI-XRD), Photoluminescence (PL), Raman spectroscopy and X-ray Photoelectron Spectroscopy (XPS). Using the Focussed Ion Beam (FIB) technique, single nanowire gas sensor devices were fabricated. Single nanowire RT CO gas sensors using the proposed Au decorated beta-Ga2O3 nanowire achieved remarkable sensitivity for 100 ppm CO gas at room temperature. Besides, we have compared the RT CO gas sensing properties of multiple-networked Au decorated beta-Ga2O3 nanowires with single Au-decorated beta-Ga2O3 nanowire and single pure beta-Ga2O3 nanowire. In addition, bipolar resistive switching property is inspected for the Au/pure beta-Ga2O3 nanowires/p-Si and Au/Au decorated beta-Ga2O3 nanowires/p-Si structures.
引用
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页数:11
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