Vacuum ion emission from solid electrolytes: An alternative source for focused ion beams

被引：16

作者：

Escher, Conrad

Thomann, Sandra

Andreoli, Cornel

Fink, Hans-Werner

Toquant, Julien

Pohl, Dieter W.

机构：

[1] Univ Zurich, Inst Phys, CH-8057 Zurich, Switzerland

[2] Univ Basel, Inst Phys, CH-4056 Basel, Switzerland

来源：

APPLIED PHYSICS LETTERS | 2006年 / 89卷 / 05期

关键词：

D O I：

10.1063/1.2264092

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A bright ion source based on the solid electrolyte (AgI)(0.5)(AgPO3)(0.5) has been developed. The solid electrolyte source provides stable currents of Ag+ in the microampere regime that make it suitable for focused ion beam applications. Similar conditions are expected for different solid electrolyte materials and their corresponding ions. This opens a broad field of applications in structuring and modifying devices on a nanometer scale using focused ion beams. (c) 2006 American Institute of Physics.

引用

页数：2

共 7 条

[1] Superionic solids: composite electrolyte phase - an overview [J].