Mechanical and tribological properties of a-C/a-C:Ti multilayer films with various bilayer periods

被引：32
作者：
Bai, W. Q.
Cai, J. B.
Wang, X. L. [1 ]
Wang, D. H.
Gu, C. D.
Tu, J. P.
机构：
[1] Zhejiang Univ, State Key Lab Silicon Mat, Hangzhou 310027, Zhejiang, Peoples R China
来源：
THIN SOLID FILMS | 2014年 / 558卷
基金：
中国国家自然科学基金;
关键词：
Amorphous carbon; Multilayer; Bilayer period; Mechanical property; Tribological property; DIAMOND-LIKE CARBON; NANOCOMPOSITE THIN-FILMS; BIAS-GRADED DEPOSITION; AMORPHOUS-CARBON; WATER LUBRICATION; COATINGS; MICROSTRUCTURE; TI; CARBIDE; PERFORMANCE;
D O I：
10.1016/j.tsf.2014.03.039
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Thick a-C/a-C:Ti multilayer films with bilayer periods of 12-70 nm were deposited on wTi6Al4V alloy substrate by means of closed field unbalance magnetron sputtering. The morphology and microstructure of the multilayer films were investigated by scanning electron microscopy, high resolution transmission electron microscopy and X-ray photoelectron spectroscopy. Nanocrystalline TiC was distributed in the a-C: Ti layer and at the interface between the two adjacent layers. The mechanical and tribological properties were evaluated by Rockwell and scratch tests, a nanoindentor and a ball-on-disk tribometer. The multilayer film with a bilayer period of 12 nm showed the highest adhesion strength, hardness (26 GPa) and elastic modulus (232 GPa); it also had the lowest average coefficient of friction (0.09) and a wear rate of 8.06 x 10(-17) m(3) N-1 m(-1). (C) 2014 Elsevier B.V. All rights reserved.
引用
收藏
页码：176 / 183
页数：8
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