Comparison of defects responsible for nanosecond laser-induced damage and ablation in common high index optical coatings

被引：8

作者：

Xu, Yejia ^{[1
]}

Abdulameer, Mohammed R. ^{[2
]}

Emmert, Luke A. ^{[1
]}

Day, Travis ^{[3
]}

Patel, Dinesh ^{[3
]}

Menoni, Carmen S. ^{[3
]}

Rudolph, Wolfgang ^{[1
]}

机构：

[1] Univ New Mexico, Dept Phys & Astron, 1919 Lomas Blvd Northeast, Albuquerque, NM 87131 USA

[2] Univ Baghdad, Dept Phys, Baghdad 10071, Iraq

[3] Colorado State Univ, Dept Elect & Comp Engn, 1320 Campus Delivery, Ft Collins, CO 80523 USA

来源：

OPTICAL ENGINEERING | 2017年 / 56卷 / 01期

关键词：

laser-induced damage; nanosecond pulse; defect density; optical coatings; surfaces; THIN-FILMS; 351; NM; BREAKDOWN;

D O I：

10.1117/1.OE.56.1.011019

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Spatiotemporally resolved optical laser-induced damage is an experimental technique used to study nanosecond laser damage and initiation of ablation in dielectric metal-oxide films used for optical coatings. It measures the fluence (intensity) at the initiation of damage during a single laser pulse. The technique was applied to coatings of HfO2, Sc2O3, and Ta2O5, which were prepared by ion-beam sputtering, and HfO2 which was prepared by electron-beam evaporation. Using the data obtained, we were able to retrieve the defect density distributions of these films without a priori assumptions about their functional form. (C) 2016 Society of Photo-Optical Instrumentation Engineers (SPIE)

引用

页数：6

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