Prolongation of a filament lifetime using SF6 plasma method

被引：2

作者：

Ohkoshi, K ^{[1
]}

Saitoh, Y ^{[1
]}

Kamiya, T ^{[1
]}

Sakai, T ^{[1
]}

Tajima, S ^{[1
]}

机构：

[1] Japan Atom Energy Res Inst, Adv Radiat Technol Ctr, Gunma 3701292, Japan

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2000年 / 71卷 / 02期

关键词：

D O I：

10.1063/1.1150419

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We succeeded in prolonging the lifetime of tungsten filaments in a Freeman ion source using SF6 plasma method. The plasma chamber of the source is made of molybdenum. The molybdenum fluorinated with SF6 plasma is vaporized and sticks to the filament. The stuck Mo to the filament can compensate the loss of tungsten filament. In order to prolong the lifetime of the filament, it is important that the amount of the lost W from the filament balances that of the stuck metals from the chamber wall and the filament itself. The balance can be adjusted with the arc current and the gas flow of the source. SF6(Ar) plasma method has effects of prolonging the lifetime of filaments, of stabilizing plasma, and of minimizing corrosive dirt. (C) 2000 American Institute of Physics. [S0034-6748(00)68202-3].

引用

页码：1174 / 1176

页数：3

共 4 条

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Saitoh, Y
Ohkoshi, K
Yokota, W
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1998, 69 (02) : 703 - 705
[3] TIARA ELECTROSTATIC ACCELERATORS FOR MULTIPLE ION-BEAM APPLICATION
SAITOH, Y
TAJIMA, S
TAKADA, I
MIZUHASHI, K
UNO, S
OHKOSHI, K
ISHII, Y
KAMIYA, T
YOTUMOTO, K
TANAKA, R
IWAMOTO, E
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1994, 89 (1-4) : 23 - 26
[4] SAKAI T, 1998, NUCL INSTRUM METHODS, V390, P136

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