Piezoelectric coupling effect of ferroelectrics in scanning electron acoustic imaging

The signal generation mechanism by piezoelectric effect in scanning electron acoustic microscope (SEAM) of ferroelectric ceramics is described. The theory of intensity-modulated electron beam imaging with acoustic wave generation through the piezoelectric effect has been developed in one dimension by solving electric field distribution in sample, Verner and piezoelectric equations in sample and transducer respectively. The relationships among the electron acoustic signal, experimental conditions and sample properties have been obtained.