Investigation of hydrogenated CVD diamond films by photo-thermal ionization spectroscopy

被引:2
作者
Hikavyy, A. [1 ]
Clauws, P.
Deferme, W.
Bogdan, G.
Haenen, K.
Nesladek, M.
机构
[1] Univ Ghent, Krijgslann 281, B-9000 Ghent, Belgium
[2] Limburg Univ Centrum, Inst Mat Res, Limburg, Belgium
[3] IMEC, Div IMOMEC, B-3590 Diepenbeek, Belgium
关键词
diamond; hydrogenation; shallow impurities; photocurrent measurements;
D O I
10.1016/j.diamond.2005.11.020
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Different hydrogenated CVD diamond films as well as bulk IIb and IIa diamonds were investigated by means of photo-thermal ionization spectroscopy. All samples show a new photocurrent signal at temperatures lower than 120-20 K depending on the sample with a threshold around 100 meV what suggests a presence of shallow levels on the hydrogenated diamond surface. The photocurrent spectrum due to these shallow levels consists of features similar to the two-phonon absorption in diamond. Influence of annealing in air on the photocurrent behavior was investigated as well. (c) 2005 Elsevier B.V All rights reserved.
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页码:682 / 686
页数:5
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