Transverse waves trapped by metallic gratings deposited on thin quartz plates

被引:1
作者
Briot, JB
Ballandras, S
Bigler, E
Gavignet, E
Martin, G
机构
[1] Lab. Phys. Metrologie Oscillateurs, Associe a l'Univ. de Franche-Comte, F-25044 Besançon Cedex
[2] Lab. Phys. Metrologie Oscillateurs, Besançon
关键词
acoustic waves; quartz plates; temperature compensation; gravimetric sensitivity;
D O I
10.1016/S0924-4247(97)01547-1
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A theoretical model has been developed to predict the properties of transverse waves propagating under periodic metal strip gratings deposited on piezoelectric plates of finite thickness. The reliability of the model is demonstrated by comparing theoretical and experimental resonance frequencies of synchronous devices built on 128 mu m thick AT-and Z-cut plates of quartz. Temperature sensitivities have also been measured experimentally. Finally, a theoretical analysis of the gravimetric sensitivity of these devices is reported. The case of a purely elastic load has been considered. Results are compared to state-of-the-art. (C) 1997 Elsevier Science S.A.
引用
收藏
页码:543 / 550
页数:8
相关论文
共 16 条
  • [1] Abbott BP, 1995, ULTRASON, P239, DOI 10.1109/ULTSYM.1995.495575
  • [2] PLATE MODES IN PIEZOELECTRIC MULTILAYERED STRUCTURES
    ADLER, EL
    NASSAR, AA
    [J]. REVUE DE PHYSIQUE APPLIQUEE, 1985, 20 (06): : 311 - 317
  • [3] [Anonymous], 1949, P IRE, V37, P1378
  • [4] STW RESONANCES ON CORRUGATED PLATES OF FINITE THICKNESS
    AULD, BA
    RENARD, A
    HENAFF, J
    [J]. ELECTRONICS LETTERS, 1982, 18 (04) : 183 - 184
  • [5] HORIZONTAL SHEAR SURFACE-WAVES ON CORRUGATED SURFACES
    AULD, BA
    GAGNEPAIN, JJ
    TAN, M
    [J]. ELECTRONICS LETTERS, 1976, 12 (24) : 650 - 652
  • [6] AVRAMOV ID, 1992, PROCEEDINGS OF THE 1992 IEEE FREQUENCY CONTROL SYMPOSIUM, P391, DOI 10.1109/FREQ.1992.269988
  • [7] Bagwell T. L., 1987, P IEEE ULTR S, P319
  • [8] Experimental measurements of STW properties on quartz plates of finite thickness
    Ballandras, S
    Gavignet, E
    Bigler, E
    Martin, G
    [J]. ELECTRONICS LETTERS, 1996, 32 (04) : 413 - 414
  • [9] SURFACE TRANSVERSE-WAVES ON PIEZOELECTRIC PLATES WITH METAL STRIP LAYERS DEPOSITED ON BOTH SIDES
    BALLANDRAS, S
    GAVIGNET, E
    BIGLER, E
    [J]. JOURNAL DE PHYSIQUE III, 1995, 5 (09): : 1425 - 1436
  • [10] BALLANDRAS S, IN PRESS P IEEE 1996