Medical pressure sensors on the basis of silicon microcrystals and SOI layers

被引：25

作者：

Druzhinin, A ^{[1
]}

Lavitska, E ^{[1
]}

Maryamova, I ^{[1
]}

机构：

[1] Lviv Polytech Univ, UA-290013 Lviv, Ukraine

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1999年 / 58卷 / 1-3期

关键词：

pressure sensors; piezoresistive; silicon microcrystals; SOI layers; medical tests;

D O I：

10.1016/S0925-4005(99)00121-5

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Piezoresistive pressure sensors on the basis of semiconductor microcrystals and laser recrystallized SOI layers have been developed. Design examples of the sensors and some devices for medical applications are described. In particular, silicon microcrystals were used in: sensors for intracranial and interbone pressure measurement, pressure sensors in the probe for gastroenterological diagnostics, high-sensitive pressure-rarefaction sensor in the device for the functional diagnostics of the pharyngotympanic tube. Microelectronic device for the arterial pressure measurement with piezoresistive pressure sensor has been developed and prepared for the mass production. (C) 1999 Elsevier Science S.A. All rights reserved.

引用

页码：415 / 419

页数：5

共 4 条

[1] Mechanical sensors based on laser-recrystallized SOI structures [J].