Pressure Mode Control of Pneumatic Isolation Table with Two Degrees-of-Freedom

被引：0

作者：

Aoki, Yui ^{[1
]}

Wakui, Shinji ^{[2
]}

机构：

[1] Tokyo Univ Agr & Technol, Grad Sch Engn, 2-24-16 Naka, Koganei, Tokyo 1848588, Japan

[2] Tokyo Univ Agr & Technol, Inst Engn, 2-24-16 Naka, Koganei, Tokyo 1848588, Japan

来源：

2016 INTERNATIONAL CONFERENCE ON ADVANCED MECHATRONIC SYSTEMS (ICAMECHS) | 2016年

关键词：

pneumatic isolation table; two degrees-of-freedom; pressure mode control; mode selection matrix;

D O I：

暂无

中图分类号：

TP3 [计算技术、计算机技术];

学科分类号：

0812 ;

摘要：

This paper considers the vibration control of a pneumatic isolation table with two degrees-of-freedom. This table is supported two air springs. We propose mode control for the pressure management of air springs instead of independent control. Effects of pressure mode control are shown by time and frequency responses. In addition, decoupling of this system is analyzed by calculating transfer function. Furthermore when air springs are not ideal, parameters of pneumatic isolation table have unevenness. It is examined if modified Hadamard matrix compensates for this.

引用

页码：265 / 270

页数：6

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