Design of compact silicon antennas based on high directionality gratings

被引:0
作者
Khajavi, Shahrzad [1 ]
Melati, Daniele [2 ]
Cheben, Pavel [2 ]
Schmid, Jens H. [2 ]
Xu, Dan-Xia [2 ]
Janz, Siegfried [2 ]
Ye, Winnie N. [1 ]
机构
[1] Carleton Univ, Dept Elect, Ottawa, ON K1S 5B6, Canada
[2] Natl Res Council Canada, Adv Elect & Photon Res Ctr, Ottawa, ON K1A 0R6, Canada
来源
2020 IEEE PHOTONICS CONFERENCE (IPC) | 2020年
关键词
Silicon Photonics; Nano-Antennas; Optical Phased Array; Fabrication Tolerance; Surface Grating; INTERLEAVED TRENCHES; COUPLER;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We study the fabrication tolerance of two types of grating antennas featuring U-shape and L-shape structures. The L-shape design is found to be more fabrication tolerant, showing performance degradation of less than 2% assuming common fabrication imperfections, making it promising for optical phased array applications.
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页数:2
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