Advances in quantitative nanoscale subsurface imaging by mode-synthesizing atomic force microscopy

被引：17

作者：

Vitry, P. ^{[1
]}

Bourillot, E. ^{[1
]}

Plassard, C. ^{[1
]}

Lacroute, Y. ^{[1
]}

Tetard, L. ^{[2
]}

Lesniewska, E. ^{[1
]}

机构：

[1] Univ Bourgogne, CNRS, UMR 6303, ICB, F-21078 Dijon, France

[2] Univ Cent Florida, Nanosci Technol Ctr, Orlando, FL 32826 USA

来源：

APPLIED PHYSICS LETTERS | 2014年 / 105卷 / 05期

关键词：

ULTRASONIC FREQUENCIES; HOLOGRAPHY; NANOPARTICLES; CANTILEVERS;

D O I：

10.1063/1.4892467

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

This paper reports on advances toward quantitative non-destructive nanoscale subsurface investigation of a nanofabricated sample based on mode synthesizing atomic force microscopy with heterodyne detection, addressing the need to correlate the role of actuation frequencies of the probe f(p) and the sample f(s) with depth resolution for 3D tomography reconstruction. Here, by developing a simple model and validating the approach experimentally through the study of the nanofabricated calibration depth samples consisting of buried metallic patterns, we demonstrate avenues for quantitative nanoscale subsurface imaging. Our findings enable the reconstruction of the sample depth profile and allow high fidelity resolution of the buried nanostructures. Non-destructive quantitative nanoscale subsurface imaging offers great promise in the study of the structures and properties of complex systems at the nanoscale. (C) 2014 AIP Publishing LLC.

引用

页数：5

共 21 条

[11] Detection of defects buried in metallic samples by scanning microwave microscopy [J].

Plassard, C. ;

Bourillot, E. ;

Rossignol, J. ;

Lacroute, Y. ;

Lepleux, E. ;

Pacheco, L. ;

Lesniewska, E. .

PHYSICAL REVIEW B, 2011, 83 (12)

[12] Vibrations of free and surface-coupled atomic force microscope cantilevers: Theory and experiment [J].

Rabe, U ;

Janser, K ;

Arnold, W .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1996, 67 (09) :3281-3293

[13]

Rose J.L., 2000, The Journal of the Acoustical Society of America, V107, P1807, DOI [10.1121/1.428552, DOI 10.1121/1.428552]

[14] Ultrasound holography for noninvasive imaging of buried defects and interfaces for advanced interconnect architectures [J].

Shekhawat, Gajendra ;

Srivastava, Arvind ;

Avasthy, Shraddha ;

Dravid, Vinayak .

APPLIED PHYSICS LETTERS, 2009, 95 (26)

[15] Probing Buried Defects in Extreme Ultraviolet Multilayer Blanks Using Ultrasound Holography [J].

Shekhawat, Gajendra S. ;

Avasthy, Shraddha ;

Srivastava, Arvind K. ;

Tark, Soo-Hyun ;

Dravid, Vinayak P. .

IEEE TRANSACTIONS ON NANOTECHNOLOGY, 2010, 9 (06) :671-674

[16] Nanoscale imaging of buried structures via scanning near-field ultrasound holography [J].

Shekhawat, GS ;

Dravid, VP .

SCIENCE, 2005, 310 (5745) :89-92

[17] Imaging nanoparticles in cells by nanomechanical holography [J].

Tetard, Laurene ;

Passian, Ali ;

Venmar, Katherine T. ;

Lynch, Rachel M. ;

Voy, Brynn H. ;

Shekhawat, Gajendra ;

Dravid, Vinayak P. ;

Thundat, Thomas .

NATURE NANOTECHNOLOGY, 2008, 3 (08) :501-505

[18]

Tetard Laurene, 2012, Methods Mol Biol, V926, P331, DOI 10.1007/978-1-62703-002-1_21

[19] Elastic phase response of silica nanoparticles buried in soft matter [J].

Tetard, Laurene ;

Passian, Ali ;

Lynch, Rachel M. ;

Voy, Brynn H. ;

Shekhawat, Gajendra ;

Dravid, Vinayak ;

Thundat, Thomas .

APPLIED PHYSICS LETTERS, 2008, 93 (13)

[20] Subsurface-AFM: sensitivity to the heterodyne signal [J].

Verbiest, G. J. ;

Oosterkamp, T. H. ;

Rost, M. J. .

NANOTECHNOLOGY, 2013, 24 (36)

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