Piezoelectric AlGaAs bimorph microactuators

被引：12
|
作者：
Li, L. [1 ]
Kumar, P.
Kanakraju, S.
DeVoe, D. L.
机构：
[1] Univ Maryland, College Pk, MD 20742 USA
[2] Lab Phys Sci, College Pk, MD 20740 USA
来源：
JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2006年 / 16卷 / 05期
关键词：
D O I：
10.1088/0960-1317/16/5/026
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Piezoelectric bimorph cantilever microactuators based on single-crystal Al0.3Ga0.7As are demonstrated. Fabricated devices are characterized for their quasistatic and resonant behavior when driven in both unimorph and bimorph configurations. Quasistatic actuator behavior is compared with a simple analytic model. Measured unimorph and bimorph tip deflections match well with the model, with deviations resulting from imperfections in device geometry and electrical resistivity of the electrodes. The effects of bimorph actuation on linearity and structural damping at resonance are also evaluated.
引用
收藏
页码：1062 / 1066
页数：5
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