Fabrication of Ordered Nanostructured Arrays Using Poly(dimethylsiloxane) Replica Molds Based on Three-Dimensional Colloidal Crystals

被引：53
作者：
Choi, Hong Kyoon [1 ]
Kim, Mun Ho [2 ]
Im, Sang Hyuk [2 ]
Park, O. Ok [1 ]
机构：
[1] Korea Adv Inst Sci & Technol, Dept Chem & Biomol Engn, Grad Program BK 21, Taejon 305701, South Korea
[2] LG Chem Ltd, Taejon 305380, South Korea
来源：
ADVANCED FUNCTIONAL MATERIALS | 2009年 / 19卷 / 10期
关键词：
ELECTROPHORETIC DEPOSITION; LITHOGRAPHY; THICKNESS; PARTICLES; FILMS;
D O I：
10.1002/adfm.200801096
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
Hexagonally arrayed structures of colloidal crystals with uniform surface are a good candidate for master molds to be used in soft lithography. Here, the fabrication of periodically arrayed nanostructures using poly(dimethylsiloxane) (PDMS) molds based on three-dimensionally (3D) ordered colloidal crystals is reported. A robust, high-quality 3D colloidal-crystal master molds is prepared using the colloidal suspension containing a water-soluble polymer. The surface patterns of the 3D colloidal crystals can then be transferred onto a polymer film via soft lithography, by means of the replication of the surface pattern with PDMS. Various hexagonally arrayed nanostructure patterns can be fabricated, including close-packed and non-close-packed 2D arrays and honeycomb structures by the structural modification of the 3D colloidal-crystal templates. The replicated hexagonally arrayed structures can also be used as templates for producing colloidal crystals with 2D superlattices.
引用
收藏
页码：1594 / 1600
页数：7
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