共 50 条
- [41] The study of the graded index anti-reflective coating based on silicon oxynitride JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS, 2015, 17 (1-2): : 50 - 61
- [44] A novel dual layer polymeric anti-reflective coating (PARC) for sub-0.18μm KrF lithography OPTICAL MICROLITHOGRAPHY XIII, PTS 1 AND 2, 2000, 4000 : 982 - 993
- [49] Anti-reflective and waterproof hard coating for high power laser optical elements BEAMED ENERGY PROPULSION, 2006, 830 : 457 - +
- [50] Study of hydrogenated AIN as an anti-reflective coating and for the effective surface passivation of silicon PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS, 2013, 7 (07): : 457 - 460