Calculation of the high-frequency conductivity and the Hall constant of a thin semiconductor film.

被引:0
作者
Savenko, O. V. [1 ]
Romanov, D. N. [1 ]
Kuznetsova, I. A. [1 ]
机构
[1] PG Demidov Yaroslavl State Univ, Sovetskaya St 14, Yaroslavl 150000, Russia
来源
INTERNATIONAL CONFERENCE ON MICRO- AND NANO-ELECTRONICS 2016 | 2016年 / 10224卷
关键词
thin film; Boltzmann equation; distribution function; mirrority coefficient; conductivity; Hall constant; METALLIC-FILMS;
D O I
10.1117/12.2265659
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The task about calculation of high-frequency conductivity and Hall constant of a thin semiconductor film is solved by the kinetic method. This film is placed in transverse stationary magnetic field and longitudinal alternative electric field. The ratio between film thickness and mean free path of charge carriers is assumed to be arbitrary. Skin effect is negligible. The diffuse-specular mechanism of charge carriers scattering from film surfaces is considered in the view of equal mirrority coefficients of the upper and lower film surfaces. The dependences of non-dimensional conductivity and Hall constant on non-dimensional parameters: electric field frequency, magnetic field induction and film thickness are investigated. The comparative analysis of obtained results with the calculations for the case of a metal film are made.
引用
收藏
页数:10
相关论文
共 8 条
[1]  
Anselm A., 1981, Introduction to semiconductor theory
[2]   The conductivity of thin metallic films according to the electron theory of metals [J].
Fuchs, K .
PROCEEDINGS OF THE CAMBRIDGE PHILOSOPHICAL SOCIETY, 1938, 34 :100-108
[3]  
Landau L. D., 1984, COARSE THEORETICAL P, V8
[4]  
Lifshitz I. M., 1971, ELECT THEORY METALS
[5]   THE INFLUENCE OF A TRANSVERSE MAGNETIC FIELD ON THE CONDUCTIVITY OF THIN METALLIC FILMS [J].
SONDHEIMER, EH .
PHYSICAL REVIEW, 1950, 80 (03) :401-406
[6]   The mean free path of electrons in metals [J].
Sondheimer, EH .
ADVANCES IN PHYSICS, 2001, 50 (06) :499-537
[7]   The effect of reflectance coefficients on the interaction of an H wave with a thin metal film [J].
Utkin, A. I. ;
Yushkanov, A. A. .
OPTICS AND SPECTROSCOPY, 2014, 117 (04) :632-635
[8]  
Utkin A. I., 2014, B MSRU PM, V3, P38