Mechanical Properties Measurement of Polymer Films by Bulge Test and Fringe Projection

被引:5
|
作者
Lin, C. S. [1 ]
Horng, T. L. [2 ]
Chen, J. H. [3 ]
Chen, K. H. [4 ]
Wu, J. J. [5 ]
Chen, C. Y. [5 ]
Ma, S. H. [3 ]
机构
[1] Feng Chia Univ, Program Mech & Aeronaut Engn, Taichung 40724, Taiwan
[2] Feng Chia Univ, Dept Math Appl, Taichung 40724, Taiwan
[3] Feng Chia Univ, Dept Photon, Taichung 40724, Taiwan
[4] Feng Chia Univ, Dept Elect Engn, Taichung 40724, Taiwan
[5] Feng Chia Univ, Dept Environm Sci & Engn, Taichung 40724, Taiwan
关键词
STRESS;
D O I
10.1155/2014/170279
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
This paper aims at determining the mechanical properties such as Poisson ratio, biaxial modulus, and residual stress of polymer membranes using the bulge test and fringe projection. Under this idea, a bulge test apparatus has been developed for robust usage, under the room temperature, in industrial environments that are usually noisy and full of all kinds of vibrations. A setup of the bulge test, consisting of single chips and digital on-off valves, was used to achieve automatic precision control of pressure application to gas chamber with a circular polyimide (PI) test film fixed on the opening of it. A deformed image was then obtained via fringe projections with a series of optical apparatuses, and a 3D membrane deformation distribution was further achieved from this deformed image by some image processes that are chiefly through wavelet transformation and phase expansion. With the measurements of maximum membrane deformation versus applied pressure and given the Young's modulus of test membrane, we could further calculate the Poisson ration (and then biaxial modulus) and residual stress of the film. Also, the measurements were validated to be highly accurate by comparison with a finite element analysis.
引用
收藏
页数:12
相关论文
共 50 条
  • [1] Mechanical properties measurement of silicon nitride thin films using the bulge test
    Lee, Hun Kee
    Ko, Seong Hyun
    Han, Jun Soo
    Park, HyunChul
    MICROELECTRONICS: DESIGN, TECHNOLOGY, AND PACKAGING III, 2008, 6798
  • [2] Measurement of Mechanical Properties of Thin Films Using a Combination of the Bulge Test and Nanoindentation
    Jung, Bong-Bu
    Lee, Hun-Kee
    Park, Hyun-Chul
    TRANSACTIONS OF THE KOREAN SOCIETY OF MECHANICAL ENGINEERS B, 2012, 36 (02) : 117 - 123
  • [3] Mechanical properties of polymer thin film measured by the bulge test
    Huang, C. K.
    Lou, W. M.
    Tsai, C. J.
    Tung-Chuan, Wu B.
    Lin, Hung-Yi
    THIN SOLID FILMS, 2007, 515 (18) : 7222 - 7226
  • [4] DEVELOPMENT OF THE BULGE TEST EQUIPMENT FOR MEASURING MECHANICAL PROPERTIES OF THIN FILMS
    Holzer, Jakub
    Pikalek, Tomas
    Buchta, Zdenek
    Lazar, Josef
    Tinoco Hector, A.
    Chlupova, Alice
    Kruml, Tomas
    METAL 2017: 26TH INTERNATIONAL CONFERENCE ON METALLURGY AND MATERIALS, 2017, : 1053 - 1058
  • [5] Dynamic measurement of strain in test specimen by fringe projection
    Leon-Huerta, Andrea
    Martinez, Amalia
    Rayas, Juan Antonio
    Cordero, Raul
    INTERFEROMETRY XIV: TECHNIQUES AND ANALYSIS, 2008, 7063
  • [6] Bulge test investigation of the influence of moisture on mechanical properties of thin polymer layers
    Nakladal, A
    Buchhold, R
    Köhler, R
    Gerlach, G
    Stavrev, M
    Wenzel, C
    Baumann, K
    Nowak, B
    MICROELECTROMECHANICAL STRUCTURES FOR MATERIALS RESEARCH, 1998, 518 : 105 - 110
  • [7] Mechanical properties of tin thin films measured using nanoindentation and bulge test
    Shojaei, OR
    Karimi, A
    FUNDAMENTALS OF NANOINDENTATION AND NANOTRIBOLOGY, 1998, 522 : 245 - 250
  • [8] Comparison of mechanical properties of TiN thin films using nanoindentation and bulge test
    Shojaei, OR
    Karimi, A
    THIN SOLID FILMS, 1998, 332 (1-2) : 202 - 208
  • [9] Investigation of mechanical properties of gold thin films using a bulge test technique
    Hemel, A.
    Jacques, A.
    Schenk, T.
    Ferry, O.
    Kruml, T.
    15TH INTERNATIONAL CONFERENCE ON THE STRENGTH OF MATERIALS (ICSMA-15), 2010, 240
  • [10] The mechanical properties of electroplated Cu thin films measured by means of the bulge test technique
    Xiang, Y
    Chen, X
    Vlassak, JJ
    THIN FILMS: STRESSES AND MECHANICAL PROPERTIES IX, 2002, 695 : 189 - 194