Roll angular displacement measurement system with microradian accuracy

被引:57
作者
Wu, CM
Chuang, YT
机构
[1] Natl Tsing Hua Univ, Dept Nucl Sci, Hsinchu 300, Taiwan
[2] Natl Taipei Univ, Inst Optoelect, Taipei 106, Taiwan
关键词
angular displacement measurement; optical sensors; phase measurement; interferometers;
D O I
10.1016/j.sna.2004.04.005
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A novel compact roll angular displacement measurement system is presented. It consists of a linearly orthogonally polarized, heterodyne laser source as the detection probe beam, a wave-retardation plate or a set of a half-wave plate plus a wave-retardation plate as the angle-sensing element to form an interferometric system. The roll angular displacement of a moving device can be detected by measuring the phase difference between the reference and measurement beams. The experimental results fit well with the theoretical analysis and a measurement resolution of sub-microradian over a half-degree is achieved experimentally. (C) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码:145 / 149
页数:5
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