Microstructural properties and formation mechanisms of GaN nanorods grown on Al2O3 (0001) substrates

被引:0
|
作者
Lee, Kyu Hyung [3 ]
Lee, Jeong Yong [3 ]
Kwon, Young Hae [2 ]
Kang, Tae Won [2 ]
Kim, Dong Hun [1 ]
Lee, Dea Uk [1 ]
Kim, Tae Whan [1 ]
机构
[1] Hanyang Univ, Div Elect & Comp Engn, Adv Semicond Res Ctr, Seoul 133791, South Korea
[2] Dongguk Univ, Quantum Funct Semicond Res Ctr, Seoul 100715, South Korea
[3] Korea Adv Inst Sci & Technol, Dept Mat Sci & Engn, Taejon 305701, South Korea
关键词
VAPOR-PHASE EPITAXY; LIGHT-EMITTING-DIODES; SEMICONDUCTOR NANOWIRES; NANOTUBES;
D O I
10.1557/JMR.2009.0298
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
X-ray diffraction patterns, scanning electron microscopy images, and transmission electron microscopy images showed that one-dimensional GaN nanorods with [0001]-oriented single-crystal line wurtzite structures were grown on Al2O3 (0001) substrates by hydride vapor-phase epitaxy without a catalyst. The tip morphology of the GaN nanorods became flat with increasing temperature difference between the gas mixing and the substrate zones. The gas mixing temperature significantly affected the formation of the nanorods, and the substrate temperature influenced the morphology and the strain of the GaN nanorods near the GaN/Al2O3 heterointerface. The strain and the stress existing in the GaN layer near the heterointerface were decreased with increasing growth rate. The formation mechanisms of the GaN nanorods grown on the Al2O3 (0001) substrates are described on the basis of the experimental results.
引用
收藏
页码:2476 / 2482
页数:7
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