A Novel Diamond Microprobe for Neuro-Chemical and -Electrical Recording in Neural Prosthesis

被引:51
作者
Chan, Ho-Yin [1 ]
Aslam, Dean M. [1 ,2 ]
Wiler, James A. [3 ]
Casey, Brendan [1 ]
机构
[1] Michigan State Univ, Dept Elect & Comp Engn, E Lansing, MI 48824 USA
[2] Wireless Integrated MicroSyst, Natl Sci Fdn Engn Res Ctr, Ann Arbor, MI 48109 USA
[3] Univ Michigan, Kresge Hearing Res Inst, Dept Otolaryngol, Ann Arbor, MI 48109 USA
基金
美国国家科学基金会;
关键词
Diamond microelectromechanical systems (MEMS); neural probe; polycrystalline diamond (poly-C); THIN-FILMS; CARBON; PROBE; CVD; ELECTRODES; MICROELECTRODE; ARRAY; BIOCOMPATIBILITY; FABRICATION; BEHAVIOR;
D O I
10.1109/JMEMS.2009.2015493
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper describes the design, microfabrication, and testing of a novel polyerystalline-diamond (poly-C)-based microprobe for possible applications in neural prosthesis. The probe utilizes undoped poly-C with a resistivity on the order of 10(5) Omega.cm as a supporting material, which has a Young's modulus in the range of 400-1000 GPa and is biocompatible. Boron-doped poly-C with a resistivity on the order of 10(-3) Omega.cm is used as an electrode material, which provides a chemically stable surface for both chemical and electrical detections in neural studies. The probe has eight poly-C electrode sites with diameters ranging from 2 to 150 mu m; the electrode capacitance is approximately 87 mu F/cm(2). The measured water potential window of the poly-C electrode spans across negative and positive electrode potentials and typically has a total value of 2.2 V in 1 M KCl. The smallest detectable concentration of norepinephrine (a neurotransmitter) was on the order of 10 nM. The poly-C probe has also been successfully implanted in the auditory cortex area of a guinea pig brain for in vivo neural studies. The recorded signal amplitude was 30-40 mu V and had a duration of 1 ms. [2008-0195]
引用
收藏
页码:511 / 521
页数:11
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