Kinematic structure of a parallel robot for MEMS fabrication

被引：0

作者：

Bamberger, H ^{[1
]}

Shoham, M ^{[1
]}

机构：

[1] Technion Israel Inst Technol, Dept Mech Engn, RAFAEL Armament Dev Auth Ltd, IL-32000 Haifa, Israel

来源：

ON ADVANCES IN ROBOT KINEMATICS | 2004年

关键词：

direct kinematics; parallel robot; MEMS; micro actuator; micro joint;

D O I：

暂无

中图分类号：

O1 [数学];

学科分类号：

0701 ; 070101 ;

摘要：

This investigation proposes a parallel robot structure that can be realized by MEMS technology. The robot consists of linear actuators located at the base and revolute joints only, thus making fabrication using silicon etching technology easier. The kinematic structure contains three single loop submechanisms connected in parallel to the moving platform, enabling generation of three or six degrees-of-freedom mechanisms. The forward and inverse kinematics solutions are presented.

引用

页码：113 / 122

页数：10

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