HIGH Q-FACTOR MODE-MATCHED SILICON GYROSCOPE WITH A LADDER STRUCTURE

被引：4

作者：

Goto, Katsuaki ^{[1
]}

Harada, Shota ^{[1
]}

Hata, Yoshiyuki ^{[1
]}

Ito, Keitaro ^{[1
]}

Wado, Hiroyuki ^{[1
]}

Cho, Jae Yoong ^{[2
]}

Najafi, Khalil ^{[2
]}

机构：

[1] DENSO Corp, Dept Device R&D, Kariya, Aichi, Japan

[2] Univ Michigan, Ctr Wireless Integrated MicroSensing & Syst WIMS2, Ann Arbor, MI 48109 USA

来源：

2020 7TH IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS AND SYSTEMS (INERTIAL 2020) | 2020年

关键词：

Gyroscope; Q-factor; Mode-matching; Force to rebalance;

D O I：

10.1109/inertial48129.2020.9090067

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A high Q-factor and mode-matched silicon MEMS gyroscope composed of a ladder structure has been developed. The ladder structure that is capable of suppressing energy dissipation has allowed the Q-factors of drive and sense modes to reach 120,000, which is a great value as a Si-tuning fork gyroscope. Moreover, the mode-matched high Q-factor ladder gyroscope shows an angle random walk (ARW) of 0.020 deg/root h and a bias instability (BI) of 0.20 deg/h. These measured results demonstrate that the ladder structure has enabled this silicon gyroscope to achieve high performance that is required for autonomous driving systems.

引用

页数：4

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