HIGH Q-FACTOR MODE-MATCHED SILICON GYROSCOPE WITH A LADDER STRUCTURE

被引：4
作者：
Goto, Katsuaki [1 ]
Harada, Shota [1 ]
Hata, Yoshiyuki [1 ]
Ito, Keitaro [1 ]
Wado, Hiroyuki [1 ]
Cho, Jae Yoong [2 ]
Najafi, Khalil [2 ]
机构：
[1] DENSO Corp, Dept Device R&D, Kariya, Aichi, Japan
[2] Univ Michigan, Ctr Wireless Integrated MicroSensing & Syst WIMS2, Ann Arbor, MI 48109 USA
来源：
2020 7TH IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS AND SYSTEMS (INERTIAL 2020) | 2020年
关键词：
Gyroscope; Q-factor; Mode-matching; Force to rebalance;
D O I：
10.1109/inertial48129.2020.9090067
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A high Q-factor and mode-matched silicon MEMS gyroscope composed of a ladder structure has been developed. The ladder structure that is capable of suppressing energy dissipation has allowed the Q-factors of drive and sense modes to reach 120,000, which is a great value as a Si-tuning fork gyroscope. Moreover, the mode-matched high Q-factor ladder gyroscope shows an angle random walk (ARW) of 0.020 deg/root h and a bias instability (BI) of 0.20 deg/h. These measured results demonstrate that the ladder structure has enabled this silicon gyroscope to achieve high performance that is required for autonomous driving systems.
引用
收藏
页数：4
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