Active phase-shifting interferometer using current modulation of a laser diode

被引：17

作者：

Liu, JY ^{[1
]}

Yamaguchi, I ^{[1
]}

Kato, J ^{[1
]}

Nakajima, T ^{[1
]}

机构：

[1] RIKEN, INST PHYS & CHEM RES, OPT ENGN LAB, WAKO, SAITAMA 35101, JAPAN

来源：

OPTICAL REVIEW | 1996年 / 3卷 / 04期

关键词：

active phase-shifting interferometry; laser diode; feedback; current modulation; frequency response; optical measurement;

D O I：

10.1007/s10043-996-0287-z

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

An active phase-shifting interferometer using current modulation of a laser diode is proposed. Fringe movement in the instrument is detected by a spatial filtering detector whose output is fed back to the injection current of the laser diode to lock the fringes and shift them correctly for phase shifting analysis. Frequency modulation characteristics of the laser diode and frequency response of the feedback system are first investigated. We constructed a portable interferometer head set apart from a mirror under test then measured the shape of a spherical mirror 130 mm in diameter, which was placed on a wooden table subject to vibration. Measurement repeatability of lambda/35 was achieved.

引用

页码：287 / 292

页数：6

共 13 条

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