Properties of thick PZT films prepared by modified metal organic decomposition process

Characteristics of PZT films synthesized by using a modified metal-organic decompositions (MOD) process, which is the spin-coating of a nano-powder incorporated PZT carbaxylate solution, was examined. A deposition rate as large as 0.27 mum per layer is achieved by carefully adjusting the concentration of carboxylate solution (0.4 M) and spin-coating process (2000 rpm). PZT films thus obtained possess good ferroelectric properties, i.e., Pr=18.9 muC/cm(2), Ec=42 kV/cm, when they are post-annealed at 650 degreesC (I h). Incorporation of nano-size PZT powders (similar to100 nm, 0.05 M) into the carboxylate solution (0.4 M) to replace for the PZT solute results in marked modification on deposition characteristics and hence the ferroelectric properties of the PZT films. The deposition rate decreases to 0.24 mum per layer, but the remanent polarization (Pr) increases to 19.3 muC/cm(2) and corecive field (Ec) decreases to 46.9 kV/cm.