Atomic oxygen resistant behaviors of Mo/diamond-like carbon nanocomposite lubricating films

被引:59
作者
Ji, Li [1 ,2 ]
Li, Hongxuan [1 ]
Zhao, Fei [1 ,2 ]
Quan, Weilong [1 ,2 ]
Chen, Jianmin [1 ]
Zhou, Huidi [1 ]
机构
[1] Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China
[2] Chinese Acad Sci, Grad Univ, Beijing 100049, Peoples R China
基金
中国国家自然科学基金;
关键词
Diamond-like carbon; Mo doping; Nanocomposite; Atomic oxygen; Tribological properties; AMORPHOUS-CARBON; RAMAN-SPECTROSCOPY; SPACE; COATINGS; MOS2;
D O I
10.1016/j.apsusc.2008.11.029
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Mo doped diamond-like carbon (Mo/DLC) films were deposited on Si substrates via unbalanced magnetron sputtering of molybdenum combined with plasma chemical vapor deposition of CH4/Ar. The microstructure of the. films, characterized by transmission electron microscopy and selected area electron diffraction, was considered as a nanocomposite with nano-sized MoC particles uniformly embedded in the amorphous carbon matrix. The structure, morphology, surface composition and tribological properties of the Mo/DLC films before and after the atomic oxygen (AO) irradiation were investigated and a comparison made with the DLC films. The Mo/DLC films exhibited more excellent degradation resistant behaviors in AO environment than the DLC films, and the MoC nanoparticles were proved to play a critical role of preventing the incursion of AO and maintaining the intrinsic structure and excellent tribological properties of DLC films. (C) 2008 Published by Elsevier B. V.
引用
收藏
页码:4180 / 4184
页数:5
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