Structure of atomically smoothed LiNbO3(0001) surface

被引：14
|
作者：
Saito, A
Matsumoto, H
Ohnisi, S
Akai-Kasaya, M
Kuwahara, Y
Aono, M
机构：
[1] Osaka Univ, Grad Sch Engn, Dept Mat & Life Sci, Suita, Osaka 5650871, Japan
[2] RIKEN, Harima Inst, Mikazuki, Hyogo 6795148, Japan
[3] Japan Sci & Technol Corp, SORST, Kawaguchi, Saitama 3320112, Japan
[4] Natl Inst Mat Sci, Nanomat Lab, Tsukuba, Ibaraki 3050003, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2004年 / 43卷 / 4B期
关键词：
LiNbO3; surface; treatment; atomically flat surface; morphology; AFM; CAICISS;
D O I：
10.1143/JJAP.43.2057
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
LiNbO3 (LN) is a substrate material used extensively for various optical or piezoelectric devices. We investigated an atomic-scale smoothing process of a LN single-crystal (0001) surface. Atomic force microscopy (AFM) observation revealed a surface morphology flattened from threefold symmetry to a step-terrace structure. The marked change of the surface was found to be dominated by a balance of surface diffusion and crystal growth within a period of 1-5 hours. An atomically flat surface with a straight and single-step height of 0.22 nm was obtained for a conventional LN substrate on the market. Next, we evaluated the surface composition and structure of the atomically flat LN (0001) surface by coaxial-impact collision ion scattering spectroscopy (CAICISS). We found that the atomically smoothed surface was terminated by a Nb atomic layer in which the Nb atoms were not shifted from the bulk position.
引用
收藏
页码：2057 / 2060
页数：4
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