Ultrathin amorphous C:H overcoats by pCVD on thin film media

被引：20

作者：

Yamamoto, T ^{[1
]}

Toyoguchi, T

Honda, F

机构：

[1] Fujitsu Ltd, File Memory Lab, Atsugi, Kanagawa 2430197, Japan

[2] Toyota Technol Inst, Nagoya, Aichi 4688511, Japan

来源：

IEEE TRANSACTIONS ON MAGNETICS | 2000年 / 36卷 / 01期

关键词：

amorphous carbon overcoat; DLC; head-disk interface; plasma chemical vapor deposition (p-CVD); sputtering deposition;

D O I：

10.1109/20.824435

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A summary of the material and tribological properties of amorphous carbon films for the overcoat of thin film media is presented. Two families of film are considered, One is the family of sputtered DLC film including amorphous carbon, amorphous hydrogenated, and nitrogenated carbon films, which are all widely used as overcoats for commercially available thin film media. The other film is amorphous hydrogenated carbon film, which is deposited by hot filament plasma CVD and is being developed for next generation overcoats.

引用

页码：115 / 119

页数：5

共 17 条

[1] Ultrathin protective overcoats on magnetic hard disks [J].

Anoikin, EV ;

Ng, GS ;

Yang, MM ;

Chao, JL ;

Elings, JR ;

Brown, DW .

IEEE TRANSACTIONS ON MAGNETICS, 1998, 34 (04) :1717-1719

[2] EELS ANALYSIS OF VACUUM ARC-DEPOSITED DIAMOND-LIKE FILMS [J].

BERGER, SD ;

MCKENZIE, DR ;

MARTIN, PJ .

PHILOSOPHICAL MAGAZINE LETTERS, 1988, 57 (06) :285-290

[3]

Chang R.K., 1982, Surface Enhanced Raman Scattering

[4] STRUCTURE AND PHYSICAL-PROPERTIES OF PLASMA-GROWN AMORPHOUS HYDROGENATED CARBON-FILMS [J].

COUDERC, P ;

CATHERINE, Y .

THIN SOLID FILMS, 1987, 146 (01) :93-107

[5] Tribological behavior of amorphous carbon nitride overcoats for magnetic thin-film rigid disks [J].

Cutiongco, EC ;

Li, D ;

Chung, YW ;

Bhatia, CS .

JOURNAL OF TRIBOLOGY-TRANSACTIONS OF THE ASME, 1996, 118 (03) :543-548

[6] USE OF RAMAN-SCATTERING TO INVESTIGATE DISORDER AND CRYSTALLITE FORMATION IN AS-DEPOSITED AND ANNEALED CARBON-FILMS [J].

DILLON, RO ;

WOOLLAM, JA ;

KATKANANT, V .

PHYSICAL REVIEW B, 1984, 29 (06) :3482-3489

[7] Nanomechanical properties of CNx overcoats and Cathodic Arc Carbon(CAC) films [J].

Hsiao, RC ;

Bogy, DB ;

Bhatia, CS .

IEEE TRANSACTIONS ON MAGNETICS, 1998, 34 (04) :1720-1722

[8] PERFORMANCE OF HARD DLC PROTECTIVE FILM PREPARED BY PECVD METHOD FOR THIN-FILM MAGNETIC DISK [J].

IECHIKA, K ;

KOKAKU, Y ;

OOTAKE, M ;

ABE, K ;

TANI, H ;

INABA, H .

IEEE TRANSACTIONS ON MAGNETICS, 1994, 30 (06) :4134-4136

[9] STRUCTURE AND MECHANICAL-PROPERTIES OF HYDROGENATED CARBON-FILMS PREPARED BY MAGNETRON SPUTTERING [J].

MARCHON, B ;

VO, PN ;

KHAN, MR ;

AGER, JW .

IEEE TRANSACTIONS ON MAGNETICS, 1991, 27 (06) :5160-5162

[10] RAMAN-SPECTROSCOPY ON NITROGEN-INCORPORATED AMORPHOUS HYDROGENATED CARBON-FILMS [J].

MARIOTTO, G ;

FREIRE, FL ;

ACHETE, CA .

THIN SOLID FILMS, 1994, 241 (1-2) :255-259

← 1 2 →