Atomic Layer Fluorination of Highly Oriented Pyrolytic Graphite using Hyperthermal Atomic Fluorine Beam

被引：3

作者：

Tagawa, Masahito ^{[1
]}

Yokota, Kumiko ^{[1
]}

Maeda, Ken-ichi ^{[1
]}

Yoshigoe, Akitaka ^{[2
]}

Teraoka, Yuden ^{[2
]}

机构：

[1] Kobe Univ, Grad Sch Engn, Kobe, Hyogo 6578501, Japan

[2] Japan Atom Energy Agcy, Sayo, Hyogo 6795148, Japan

来源：

APPLIED PHYSICS EXPRESS | 2009年 / 2卷 / 06期

关键词：

NEUTRAL BEAM; OXYGEN BEAM; EXPOSURE;

D O I：

10.1143/APEX.2.066002

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Hyperthermal (kinetic energy of 10eV) fluorine atom beam interaction with highly oriented pyrolytic graphite (HOPG) was studied. Surface analytical results of atomic fluorine-exposed HOPG using synchrotron radiation photoelectron spectroscopy showed that the fluorine reaction was limited at the topmost HOPG(0001) layer. This is due to the fact that the kinetic energy of 10eV is not sufficient to penetrate graphite layer but is enough for breaking C-C bonds and forms CF and CF2 functional groups through the beam-induced fluorination reactions. It was demonstrated that the use of hyperthermal energy in the range of 10eV is advantageous for damage-free modification of the topmost surface of carbon-based materials. (c) 2009 The Japan Society of Applied Physics

引用

页数：3

共 15 条

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