Sub-pixel speckle displacement measurement by using optical vortex metrology

被引:0
|
作者
Wang, Wei [1 ]
Yokozeki, Tomoaki [1 ]
Ishijima, Reika [1 ]
Wada, Atsushi [1 ]
Hanson, Steen G. [2 ]
Miyamoto, Yoko [1 ]
Takeda, Mitsuo [1 ]
机构
[1] Univ Electrocommun, Lab Informat Photon & Wave Signal Proc, Dept Informat & Commun Engn, 1-5-1 Chofugaoka, Chofu, Tokyo 1828585, Japan
[2] Risoe Natl Lab, Dept Opt & Plasma Res, DK-4000 Roskilde, Denmark
关键词
speckle photography; Riesz transform; pseudo-phase; phase singularities; optical vortex metrology;
D O I
10.1117/12.695358
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
As an alternative to correlation-based techniques widely used in conventional speckle metrology, we propose a new technique that makes use of phase singularities in the complex analytic signal of a speckle pattern as indicators of local speckle displacements. The complex analytic signal is generated by vortex filtering the speckle pattern. Experimental results are presented that demonstrate the validity and the performance of the proposed optical vortex metrology with nano-scale resolution.
引用
收藏
页数:6
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