Piezoelectric ultrasonic transducer based on flexible AIN

被引：51
作者：
Mastronardi, Vincenzo Mariano [1 ,3 ]
Guido, Francesco [1 ,2 ]
Amato, Massimiliano [1 ,2 ]
De Vittorio, Massimo [1 ,2 ]
Petroni, Simona [1 ]
机构：
[1] Ist Italiano Tecnol, UNILE, Ctr Biomol Nanotechnol, I-73010 Arnesano, LE, Italy
[2] Univ Salento, Dip Ingn Innovaz, I-73100 Lecce, Italy
[3] Dip Sci Applicata & Tecnol, I-10129 Turin, Italy
来源：
MICROELECTRONIC ENGINEERING | 2014年 / 121卷
关键词：
PMUT; Ultrasound transducer; Laser vibrometer; Aluminum Nitride; Kapton;
D O I：
10.1016/j.mee.2014.03.034
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This work presents a promising ultrasound wearable technology based on a piezoelectric transducer, realized on flexible highly oriented Aluminum Nitride, with significant mechanical displacement in spite of being attached on a rigid support. Circular membranes with different radius sizes, based on 1 mu m-thick AIN thin film as the active piezoelectric layer, are designed, fabricated, and characterized. The AIN is deposited on kapton HN substrate with a low sputtering deposition temperature that allows the integration and the compatibility with flexible electronics. Mechanical and thermal stability of kapton makes this polyimide based sheet a potential substrate for flexible piezoelectric thin film technology. The actuation at low voltage (1-10 V) of the AIN membranes is studied in air in the range of ultrasound frequencies, from 0 Hz up to 2 MHz; the voltage amplitude, the shape and displacement of the flexure mode (0,1) is studied by a Laser Doppler Vibrometer to characterize the mechanical properties of the device. (C) 2014 Elsevier B.V. All rights reserved.
引用
收藏
页码：59 / 63
页数：5
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