Multilayer coatings for focussing hard X-ray telescopes

被引:0
|
作者
Ivan, A [1 ]
Bruni, R [1 ]
Byun, K [1 ]
Everett, J [1 ]
Gorenstein, P [1 ]
Romaine, S [1 ]
机构
[1] Harvard Smithsonian Ctr Astrophys, Cambridge, MA 02138 USA
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中图分类号
V [航空、航天];
学科分类号
08 ; 0825 ;
摘要
Several multilayer test coatings for hard X-ray telescopes were fabricated using DC magnetron sputtering. The process parameters were selected from a series of trials of single layer depositions. The samples were characterized using X-ray specular reflectivity scans, AFM, and cross-sectional TEM. Additional measurements (stylus profilometry, RES, and Auger analysis) were used in the optimization of the deposition rate and of the thin film properties (density, composition, surface/interface microroughness). The X-ray reflectivity scans showed that the combinations of reflector and spacer materials tested so far (W/Si and W/C) are suited for graded d-spacing multilayer coatings that present a constant reflectivity bandpass up to 70 keV.
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页码:297 / 302
页数:6
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