Fringe modulation skewing effect in white-light vertical scanning interferometry

被引：169

作者：

Harasaki, A ^{[1
]}

Wyant, JC ^{[1
]}

机构：

[1] Univ Arizona, Ctr Opt Sci, Tucson, AZ 85721 USA

来源：

APPLIED OPTICS | 2000年 / 39卷 / 13期

关键词：

D O I：

10.1364/AO.39.002101

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

An interference fringe modulation skewing effect in white-light vertical scanning interferometry that can produce a batwings artifact in a step height measurement is described. The skewing occurs at a position on or close to the edge of a step in the sample under measurement when the step height is less than the coherence length of the light source used. A diffraction model is used to explain the effect. (C) 2000 Optical Society of America.

引用

页码：2101 / 2106

页数：6

共 17 条

[1]

Balasubramanian N., 1982, U.S. Patent, Patent No. [4,340,306, 4340306]

[2] INTERFEROMETRIC PROFILER FOR ROUGH SURFACES [J].