Optics of anisotropic nanostructures

被引:6
作者
Rokushima, Katsu
Antos, Roman
Mistrik, Jan
Visnovsky, Stefan
Yamaguchi, Tomuo
机构
[1] Charles Univ, Fac Math & Phys, Inst Phys, CZ-12116 Prague 2, Czech Republic
[2] Shizuoka Univ, Elect Res Inst, Hamamatsu, Shizuoka 4328011, Japan
关键词
periodic structures; anisotropic multilayers; magnetooptic nanostructures; photonic crystals; scatterometry;
D O I
10.1007/s10582-006-0128-0
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
The analytical formalism of Rokushima and Yamakita [J. Opt. Sec. Am. 73, 901908 (1983)] treating the Fraunhofer diffraction in planar multilayered anisotropic gratings proved to be a useful introduction to new fundamental and practical situations encountered in laterally structured periodic (both isotropic and anisotropic) multilayer media. These are employed in the spectroscopic ellipsometry for modeling surface roughness and in-depth profiles, as well as in the design of various frequency-selective elements including photonic crystals. The subject forms the basis for the solution of inverse problems in scatterometry of periodic nanostructures including magnetic and magneto-optic recording media. It has no principal limitations as for the frequencies and period to radiation wavelength ratios and may include matter wave diffraction. The aim of the paper is to make this formalism easily accessible to a broader community of students and non-specialists. Many aspects of traditional electromagnetic optics are covered as special cases from a modern and more general point of view, e.g., plane wave propagation in isotropic media, reflection and refraction at interfaces, Fabry-Perot resonator, optics of thin films and multilayers, slab dielectric waveguides, crystal optics, acousto-, electro-, and magneto-optics, diffraction gratings, etc. The formalism is illustrated on a model simulating the diffraction on a ferromagnetic wire grating.
引用
收藏
页码:665 / 764
页数:100
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