MEMS electret energy harvester with embedded bistable electrostatic spring for broadband response

被引：34

作者：

Murotani, Kazuya ^{[1
]}

Suzuki, Yuji ^{[1
]}

机构：

[1] Univ Tokyo, Dept Mech Engn, Tokyo, Japan

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2018年 / 28卷 / 10期

关键词：

MEMS; energy harvesting; bistable spring; electret; Random excitation; PIEZOELECTRIC INERTIAL GENERATOR; WIRELESS ELECTRONICS; VIBRATION; TRANSDUCERS; DRIVEN;

D O I：

10.1088/1361-6439/aac8cc

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A MEMS electret vibration energy harvester with an embedded bistable electrostatic spring for broadband response is proposed. By using a vertical electret, the bistable potential can be realized without any complex structure or additional mechanism. Based on the 1D electrostatic model, a rigorous electromechanical model as well as an approximate model with reduced parameters are developed. Based on the normalized expression of the approximate model, which is identical to the velocity-damped resonant generator model, the performance of harvesters with the proposed mechanism has been characterized in detail for harmonic excitation, band-limited white noise, and colored noise. In addition, its performance has been compared with that of a conventional duffing-type bistable generator. It is confirmed that the present mechanism has advantages such as a lower frequency range, and outperforms the duffing counterpart for colored noise.

引用

页数：11

共 35 条

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