Fabrication and metallization of three-dimensional microstructures

被引:0
|
作者
Baldacchini, T [1 ]
Lafratta, CN [1 ]
Farrer, RA [1 ]
Pons, AC [1 ]
Pons, J [1 ]
Bayindir, Z [1 ]
Naughton, MJ [1 ]
Saleh, BEA [1 ]
Teich, MC [1 ]
Fourkas, JT [1 ]
机构
[1] Boston Coll, Eugene F Merkert Chem Ctr, Chestnut Hill, MA 02167 USA
来源
NONTRADITIONAL APPROACHES TO PATTERNING | 2004年
关键词
D O I
暂无
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this work we present a method for coating three-dimensional microstructures fabricated by two-photon absorption polymerization (TPAP) with metallic patterns in a selective manner. We have developed a homemade resin featuring a commercially available photoinitiator that undergoes efficient TPA polymerization using a small fraction of the output of a mode-locked Ti:sapphire laser. Once the microstructures are fabricated, we can deposit metallic silver onto their surfaces through a multiphoton-induced process. This methodology allows us to fabricate hybrid polymer/metal microstructures.
引用
收藏
页码:159 / 161
页数:3
相关论文
共 50 条
  • [1] Elastocapillary fabrication of three-dimensional microstructures
    van Honschoten, J. W.
    Berenschot, J. W.
    Ondarcuhu, T.
    Sanders, R. G. P.
    Sundaram, J.
    Elwenspoek, M.
    Tas, N. R.
    APPLIED PHYSICS LETTERS, 2010, 97 (01)
  • [2] Metallization of Vias in Silicon Wafers to Produce Three-Dimensional Microstructures
    Vorobjova A.I.
    Labunov V.A.
    Outkina E.A.
    Grapov D.V.
    Russian Microelectronics, 2021, 50 (01) : 8 - 18
  • [3] Optical fabrication of three-dimensional polymeric microstructures
    Cheng, CM
    Li, B
    LeDuc, PR
    APPLIED PHYSICS LETTERS, 2005, 87 (16) : 1 - 3
  • [4] Fabrication of three-dimensional microstructures by soft molding
    Kim, YS
    Suh, KY
    Lee, HH
    APPLIED PHYSICS LETTERS, 2001, 79 (14) : 2285 - 2287
  • [5] LASER FABRICATION Folding three-dimensional microstructures
    Horiuchi, Noriaki
    NATURE PHOTONICS, 2012, 6 (12) : 803 - 803
  • [6] Design and fabrication of topologically complex, three-dimensional microstructures
    Jackman, RJ
    Brittain, ST
    Adams, A
    Prentiss, MG
    Whitesides, GM
    SCIENCE, 1998, 280 (5372) : 2089 - 2091
  • [7] Fabrication of Three-Dimensional Functional Microstructures on Curved Substrates Using Three-Dimensional Microlens Projection
    Zhang, Hao
    Li, Lei
    Scheiding, Sebastian
    Gebhardt, Andreas
    Risse, Stefan
    Eberhardt, Ramona
    Tuennermann, Andreas
    Yao, Donggang
    Yi, Allen Y.
    JOURNAL OF MICRO AND NANO-MANUFACTURING, 2013, 1 (03):
  • [8] Three-dimensional metallization of microtubules
    Kirsch, R
    Mertig, M
    Pompe, W
    Wahl, R
    Sadowski, G
    Bohm, KJ
    Unger, E
    THIN SOLID FILMS, 1997, 305 (1-2) : 248 - 253
  • [9] Fabrication of topologically complex three-dimensional microstructures: Metallic microknots
    Wu, H
    Brittain, S
    Anderson, J
    Grzybowski, B
    Whitesides, S
    Whitesides, GM
    JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 2000, 122 (51) : 12691 - 12699
  • [10] Toward the fabrication of hybrid polymer/metal three-dimensional microstructures
    Baldacchini, T
    LaFratta, CN
    Farrer, RA
    Pons, AC
    Pons, J
    Naughton, MJ
    Saleh, BEA
    Teich, MC
    Fourkas, JT
    ULTRAFAST PHENOMENA XIV, 2005, 79 : 807 - 809