Micromachined microsensors for manufacturing

被引：15

作者：

Gao, R ^{[1
]}

Zhang, L ^{[1
]}

机构：

[1] Univ Massachusetts, Dept Mech & Ind Engn, Amherst, MA 01003 USA

来源：

IEEE INSTRUMENTATION & MEASUREMENT MAGAZINE | 2004年 / 7卷 / 02期

关键词：

D O I：

10.1109/MIM.2004.1304562

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Microsensors for mechanical measurement applications are reviewed, focusing on the measurement of pressure, acceleration, and AE. For the pressure microsensors, three major design principles, piezoresistive, capacitive, and optical are introduced: tire pressure sensors serve as industrial examples. Overall, the review provides a glimpse into how microsensors can help improve the performance of machines, as well as achieve better control of the manufacturing process.

引用

页码：20 / 26

页数：7