Comparison of the 3ω method and time-domain thermoreflectance for measurements of the cross-plane thermal conductivity of epitaxial semiconductors

被引：171

作者：

Koh, Yee Kan ^{[1
,2
]}

Singer, Suzanne L. ^{[3
]}

Kim, Woochul ^{[4
]}

Zide, Joshua M. O. ^{[5
]}

Lu, Hong ^{[6
]}

Cahill, David G. ^{[1
,2
]}

Majumdar, Arun ^{[3
]}

Gossard, Arthur C. ^{[6
]}

机构：

[1] Univ Illinois, Dept Mat Sci & Engn, Urbana, IL 61801 USA

[2] Univ Illinois, Frederick Seitz Mat Res Lab, Urbana, IL 61801 USA

[3] Univ Calif Berkeley, Dept Mech Engn, Berkeley, CA 94720 USA

[4] Yonsei Univ, Sch Mech Engn, Seoul 120749, South Korea

[5] Univ Delaware, Dept Elect & Comp Engn, Newark, DE 19716 USA

[6] Univ Calif Santa Barbara, Dept Mat, Santa Barbara, CA 93106 USA

来源：

JOURNAL OF APPLIED PHYSICS | 2009年 / 105卷 / 05期

关键词：

aluminium compounds; erbium compounds; gallium arsenide; III-V semiconductors; indium compounds; nanoparticles; semiconductor epitaxial layers; thermal conductivity; thermoreflectance; FILMS; REDUCTION; TRANSPORT;

D O I：

10.1063/1.3078808

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The 3 omega technique and time-domain thermoreflectance (TDTR) are two experimental methods capable of measuring the cross-plane thermal conductivity of thin films. We compare the cross-plane thermal conductivity measured by the 3 omega method and TDTR on epitaxial (In0.52Al0.48)(x)(In0.53Ga0.47)(1-x)As alloy layers with embedded ErAs nanoparticles. Thermal conductivities measured by TDTR at low modulation frequencies (similar to 1 MHz) are typically in good agreement with thermal conductivities measured by the 3 omega method. We discuss the accuracy and limitations of both methods and provide guidelines for estimating uncertainties for each approach.

引用

页数：7

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