Vertically aligned carbon nanotubes produced by radio-frequency plasma-enhanced chemical vapor deposition at low temperature and their growth mechanism

被引：29
作者：
Shiratori, Y
Hiraoka, H
Yamamoto, M
机构：
[1] Int Ctr Mat Res, Kawasaki Ku, Kawasaki, Kanagawa 2100855, Japan
[2] Ritsumeikan Univ, Coll Sci & Engn, Shiga 5258577, Japan
来源：
MATERIALS CHEMISTRY AND PHYSICS | 2004年 / 87卷 / 01期
关键词：
carbon nanotubes; CVD Raman spectroscopy; field emission;
D O I：
10.1016/j.matchemphys.2004.03.017
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Vertically aligned carbon nanotubes (CNTs) were produced at a low temperature (<500degreesC) by radio-frequency plasma-enhanced chemical vapor deposition. The CNTs formed by the direct current-biased C2H2/H-2 plasma process were stacked in cup-like graphite layers and contained a catalyst particle on their top. Raman spectrum showed the features of a graphene sheet-type structure formed by this plasma process. In this reaction, the direct current bias voltage was a crucial factor for efficient CNT production. Attack of carbonic cations by a moderate kinetic energy against a substrate induced the growth of vertically aligned CNTs. The growth process is discussed in terms of the dissolution/diffusion/precipitation mechanism. (C) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码：31 / 38
页数：8
相关论文
共 42 条
[1]   LATTICE-DYNAMICAL MODEL FOR GRAPHITE [J].
ALJISHI, R ;
DRESSELHAUS, G .
PHYSICAL REVIEW B, 1982, 26 (08) :4514-4522
[2]   A NEW MODEL EXPLAINING CARBON-FILAMENT GROWTH ON NICKEL, IRON, AND NI-CU ALLOY CATALYSTS [J].
ALSTRUP, I .
JOURNAL OF CATALYSIS, 1988, 109 (02) :241-251
[3]   NUCLEATION AND GROWTH OF CARBON DEPOSITS FROM NICKEL CATALYZED DECOMPOSITION OF ACETYLENE [J].
BAKER, RTK ;
BARBER, MA ;
WAITE, RJ ;
HARRIS, PS ;
FEATES, FS .
JOURNAL OF CATALYSIS, 1972, 26 (01) :51-&
[4]   FORMATION OF FILAMENTOUS CARBON FROM IRON, COBALT AND CHROMIUM CATALYZED DECOMPOSITION OF ACETYLENE [J].
BAKER, RTK ;
HARRIS, PS ;
THOMAS, RB ;
WAITE, RJ .
JOURNAL OF CATALYSIS, 1973, 30 (01) :86-95
[5]   MODELING STUDIES OF AMORPHOUS-CARBON [J].
BEEMAN, D ;
SILVERMAN, J ;
LYNDS, R ;
ANDERSON, MR .
PHYSICAL REVIEW B, 1984, 30 (02) :870-875
[6]   Large-area synthesis of carbon nanofibres at room temperature [J].
Boskovic, BO ;
Stolojan, V ;
Khan, RUA ;
Haq, S ;
Silva, SRP .
NATURE MATERIALS, 2002, 1 (03) :165-168
[7]   Growth process conditions of vertically aligned carbon nanotubes using plasma enhanced chemical vapor deposition [J].
Chhowalla, M ;
Teo, KBK ;
Ducati, C ;
Rupesinghe, NL ;
Amaratunga, GAJ ;
Ferrari, AC ;
Roy, D ;
Robertson, J ;
Milne, WI .
JOURNAL OF APPLIED PHYSICS, 2001, 90 (10) :5308-5317
[8]   Controlling the diameter, growth rate, and density of vertically aligned carbon nanotubes synthesized by microwave plasma-enhanced chemical vapor deposition [J].
Choi, YC ;
Shin, YM ;
Lee, YH ;
Lee, BS ;
Park, GS ;
Choi, WB ;
Lee, NS ;
Kim, JM .
APPLIED PHYSICS LETTERS, 2000, 76 (17) :2367-2369
[9]   Role of amorphous carbon nanowires in reducing the turn-on field of carbon films prepared by microwave-heated CVD [J].
Chuang, CC ;
Huang, JH ;
Chen, WJ ;
Lee, CC ;
Chang, Y .
DIAMOND AND RELATED MATERIALS, 2004, 13 (4-8) :1012-1016
[10]   Field emission from carbon nanotubes grown by layer-by-layer deposition method using plasma chemical vapor deposition [J].
Chung, SJ ;
Lim, SH ;
Jang, J .
THIN SOLID FILMS, 2001, 383 (1-2) :73-77
12345